Chambergard - Entegris Chambergard Series Fast Vent Diffusers Simple Type: Vent Diffuser
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- Part Number:
- Chambergard
- Model Number:
- Chambergard
- Make:
- ENTEGRIS
- Lead Time:
- Available
- Qty In Stock:
- Available
Entegris Chambergard Series Fast Vent Diffusers Simple Type: Vent Diffuser
ChamberGardM fast vent diffusers are the choice to reliably increase system throughput by minimizing load lock vent cycle time. These diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber. They combine the flow characteristics of a diffuser with a high efficiency filter to increase efficiency and throughput.
For Resellers and High Volume Orders:
Please request a quote to obtain preferred pricing.
Features
- Available worldwide through Entegris’ global infrastructure
- Entegris’ industry-leading, patented, sintered nickel technology in a compact diffuser unit provides superior performance in all applications
- Manufactured, tested, and packaged in a cleanroom to assure product cleanliness at time of installation
- Rapid vent, gentle flow to atmosphere decreases cycle time, increases throughput and OEE
- Removal of particles greater than 0.003 µm from incoming gas minimizes defects on wafers • Easy installation/retrofit into existing tools with minimal downtime (including load lock chambers, cooling c
- Robust and efficient, ChamberGardTM diffusers are rated at 100,000 cycles before changeout
Specifications
Applications
- None Available
Aliases
- None Available
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